1. Identity statement | |
Reference Type | Journal Article |
Site | mtc-m21c.sid.inpe.br |
Holder Code | isadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S |
Identifier | 8JMKD3MGP3W34R/3UQ6RKB |
Repository | sid.inpe.br/mtc-m21c/2020/01.20.10.09 (restricted access) |
Last Update | 2020:01.20.10.09.00 (UTC) simone |
Metadata Repository | sid.inpe.br/mtc-m21c/2020/01.20.10.09.01 |
Metadata Last Update | 2022:01.04.01.34.57 (UTC) administrator |
DOI | 10.1016/j.apsusc.2019.145232 |
ISSN | 0169-4332 |
Citation Key | SilvaUedaMell:2020:MeCySi |
Title | Metal Cylindrical Sieve (MCS) for plasma confinement and low sputteringnitrogen plasma immersion ion implantation |
Year | 2020 |
Month | Apr. |
Access Date | 2024, May 19 |
Type of Work | journal article |
Secondary Type | PRE PI |
Number of Files | 1 |
Size | 1044 KiB |
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2. Context | |
Author | 1 Silva, Carla da 2 Ueda, Mário 3 Mello, Carina Barros |
Resume Identifier | 1 2 8JMKD3MGP5W/3C9JHSB |
Group | 1 2 LABAP-COCTE-INPE-MCTIC-GOV-BR 3 LABAP-COCTE-INPE-MCTIC-GOV-BR |
Affiliation | 1 Instituto Nacional de Pesquisas Espaciais (INPE) 2 Instituto Nacional de Pesquisas Espaciais (INPE) 3 Instituto Nacional de Pesquisas Espaciais (INPE) |
Author e-Mail Address | 1 carla.silva@inpe.br 2 mario.ueda@inpe.br 3 carina.mello@inpe.br |
Journal | Applied Surface Science |
Volume | 509 |
Pages | e145232 |
Secondary Mark | A1_INTERDISCIPLINAR A1_ENGENHARIAS_II A1_ENGENHARIAS_I A2_SAÚDE_COLETIVA A2_MATERIAIS A2_ENGENHARIAS_III A2_CIÊNCIAS_AGRÁRIAS_I B1_QUÍMICA B1_ODONTOLOGIA B1_MEDICINA_III B1_MEDICINA_II B1_MATEMÁTICA_/_PROBABILIDADE_E_ESTATÍSTICA B1_GEOCIÊNCIAS B1_FARMÁCIA B1_ENGENHARIAS_IV B1_CIÊNCIAS_BIOLÓGICAS_I B1_BIOTECNOLOGIA B2_ENSINO B2_CIÊNCIAS_BIOLÓGICAS_II B2_ASTRONOMIA_/_FÍSICA C_BIODIVERSIDADE |
History (UTC) | 2020-01-20 10:09:01 :: simone -> administrator :: 2020-01-20 10:09:01 :: administrator -> simone :: 2020 2020-01-20 10:09:23 :: simone -> administrator :: 2020 2022-01-04 01:34:57 :: administrator -> simone :: 2020 |
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3. Content and structure | |
Is the master or a copy? | is the master |
Content Stage | completed |
Transferable | 1 |
Content Type | External Contribution |
Version Type | publisher |
Keywords | Ion implantation Surface modification Hollow cathode discharge Deposition in metallic tubes SS308L MCS tubes |
Abstract | Nitrogen Plasma Immersion Ion Implantation (N-PIII) was performed in the Metal Cylindrical Sieve (MCS) configuration that consists of Stainless Steel 308 L (SS308L) spiral spring wound wire. Two N-PIII regimes were obtained: one using a current of 5 A (with ends open), in which an intense sputtering of the wire occurs while for currents above 12 A (with one side closed), the sputtering is diminished substantially. This behavior at different powers in MCS can be explained in terms of the sheath overlapping between the spiral spring paths. The plasma density near the wire is insufficient to overcome the sheath overlapping between the spiral spring paths when the current is low, which leads to high sputtering of the wire surface. However, in high current, sheath overlapping is avoided and high ion implantation condition is achieved. FEG-SEM analyses of the silicon sample placed on the screen plate in front of MCS mouth indicated a high deposition of the sputtered material at low current in contrast with low deposition at high current. These deposition free results allow us to plan efficient N-PIII treatments of different types and sizes of metal springs, grids, rings, and wires, with high performance, for industrial and scientific applications. |
Area | FISPLASMA |
Arrangement | urlib.net > BDMCI > Fonds > Produção anterior à 2021 > LABAP > Metal Cylindrical Sieve... |
doc Directory Content | access |
source Directory Content | there are no files |
agreement Directory Content | |
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4. Conditions of access and use | |
Language | en |
Target File | silva_metal.pdf |
User Group | simone |
Reader Group | administrator simone |
Visibility | shown |
Archiving Policy | denypublisher denyfinaldraft24 |
Read Permission | deny from all and allow from 150.163 |
Update Permission | not transferred |
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5. Allied materials | |
Next Higher Units | 8JMKD3MGPCW/3ET2RFS |
Citing Item List | sid.inpe.br/bibdigital/2013/09.25.21.49 2 sid.inpe.br/mtc-m21/2012/07.13.14.56.06 1 |
Dissemination | WEBSCI; PORTALCAPES; COMPENDEX. |
Host Collection | urlib.net/www/2017/11.22.19.04 |
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6. Notes | |
Empty Fields | alternatejournal archivist callnumber copyholder copyright creatorhistory descriptionlevel e-mailaddress format isbn label lineage mark mirrorrepository nextedition notes number orcid parameterlist parentrepositories previousedition previouslowerunit progress project rightsholder schedulinginformation secondarydate secondarykey session shorttitle sponsor subject tertiarymark tertiarytype url |
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7. Description control | |
e-Mail (login) | simone |
update | |
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